JPH0167508U - - Google Patents
Info
- Publication number
- JPH0167508U JPH0167508U JP1987164359U JP16435987U JPH0167508U JP H0167508 U JPH0167508 U JP H0167508U JP 1987164359 U JP1987164359 U JP 1987164359U JP 16435987 U JP16435987 U JP 16435987U JP H0167508 U JPH0167508 U JP H0167508U
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- electrodes
- long
- piezoelectric elements
- thin plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987164359U JPH0167508U (en]) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987164359U JPH0167508U (en]) | 1987-10-26 | 1987-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167508U true JPH0167508U (en]) | 1989-05-01 |
Family
ID=31449896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987164359U Pending JPH0167508U (en]) | 1987-10-26 | 1987-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167508U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04366702A (ja) * | 1991-06-13 | 1992-12-18 | Agency Of Ind Science & Technol | 微小変位検出器 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS561302A (en) * | 1979-06-19 | 1981-01-09 | Hitachi Cable Ltd | Method for detecting position of moving object |
| JPS5649904A (en) * | 1979-09-29 | 1981-05-06 | Hitachi Cable Ltd | Detecting method for position of moving body |
-
1987
- 1987-10-26 JP JP1987164359U patent/JPH0167508U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS561302A (en) * | 1979-06-19 | 1981-01-09 | Hitachi Cable Ltd | Method for detecting position of moving object |
| JPS5649904A (en) * | 1979-09-29 | 1981-05-06 | Hitachi Cable Ltd | Detecting method for position of moving body |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04366702A (ja) * | 1991-06-13 | 1992-12-18 | Agency Of Ind Science & Technol | 微小変位検出器 |